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B T S
Broad Tech System, Inc.
Provide Engineering Service & Parts to Semiconductor Industry
| Spare Parts Line Card |
We have extensive semiconductor spare parts inventory. We offer
new OEM spare parts & surplus parts for semiconductor equipments
including:
- AMAT 8110, 8330,P5000 Check Parts List
- ASM E2 & E200 Reactor Check Parts List
- ASML
- Canon Mask Aligners : Canon PLA-501F,PLA-501FA, PLA-600F,
MPA-500.
- Canon Stepper: FPA-3000i4/i5/iW, FPA-2500i3, FPA-2500i2,
FPA-2000i1,FPA-1550Mk4W
- CHA Mark50
- Eaton and Varian Ion Implanter: Varian 350D,CF3000, 300XP
Eaton NV10-160, NV1-80, NV6200A/AV. Varian E1000, E500
AMAT9200, 9500, Axcelis GSD's, 8250
- FSI Mercury MP & Mercury OC
- Gasonic Aura 1000, 3010
- KLA-Tencor SFS-4500/5500, SFS-6XXX
- Lam 490, 590, 4400 and 4520 Check here
- Matrix 105, 205, 303,403
- Nikon Stepper
- Novellus CVD & PVD concept 1 and concept 2
- Solitec
- SVG86,88 series
- Semitool 4" 240/440/840, 5" 260/460/860, 6" 270/470/870,
8" 280/480/880, 12" 2300/4300/8300
- Tegal 901e, 903e
-Thermco TMX Series Furnaces 4100,4300, 4700, 4900. 5100. 5200
Series
- Ultratech Stepper: 900, 1000, 1100, 1500
- Verteg 1600 & 1800 Series
- Varian3180,3190,3290
- Veeco
- WaferMarkII
We also provide high quality refurbished Mass Flow Controller
including: Brooks,Millipore, MKS, STEC, Tylan, Unit.
new OEM spare parts & surplus parts for semiconductor equipments
including:
- AMAT 8110, 8330,P5000 Check Parts List
- ASM E2 & E200 Reactor Check Parts List
- ASML
- Canon Mask Aligners : Canon PLA-501F,PLA-501FA, PLA-600F,
MPA-500.
- Canon Stepper: FPA-3000i4/i5/iW, FPA-2500i3, FPA-2500i2,
FPA-2000i1,FPA-1550Mk4W
- CHA Mark50
- Eaton and Varian Ion Implanter: Varian 350D,CF3000, 300XP
Eaton NV10-160, NV1-80, NV6200A/AV. Varian E1000, E500
AMAT9200, 9500, Axcelis GSD's, 8250
- FSI Mercury MP & Mercury OC
- Gasonic Aura 1000, 3010
- KLA-Tencor SFS-4500/5500, SFS-6XXX
- Lam 490, 590, 4400 and 4520 Check here
- Matrix 105, 205, 303,403
- Nikon Stepper
- Novellus CVD & PVD concept 1 and concept 2
- Solitec
- SVG86,88 series
- Semitool 4" 240/440/840, 5" 260/460/860, 6" 270/470/870,
8" 280/480/880, 12" 2300/4300/8300
- Tegal 901e, 903e
-Thermco TMX Series Furnaces 4100,4300, 4700, 4900. 5100. 5200
Series
- Ultratech Stepper: 900, 1000, 1100, 1500
- Verteg 1600 & 1800 Series
- Varian3180,3190,3290
- Veeco
- WaferMarkII
We also provide high quality refurbished Mass Flow Controller
including: Brooks,Millipore, MKS, STEC, Tylan, Unit.
| Request a quote? Please contact us: sales@broadtechsystem.com |
© Copyright 2007 Broad Tech System Inc. - All rights reserved.
Tel: 909-923-2665
Fax: 909-923-2699
sales@broadtechsystem.com
Ontario, CA 91761 USA
Fax: 909-923-2699
sales@broadtechsystem.com
Ontario, CA 91761 USA